High electron mobility in nearly lattice-matched AlInN∕AlN∕GaN heterostructure field effect transistors

Authors

Jinqiao Xie, Virginia Commonwealth University
Xianfeng Ni, Virginia Commonwealth University
Mo Wu, Virginia Commonwealth University
Jacob H. Leach, Virginia Commonwealth University
Ü. Özgür, Virginia Commonwealth UniversityFollow
Hadis Morkoç, Virginia Commonwealth UniversityFollow

Document Type

Article

Original Publication Date

2007

Journal/Book/Conference Title

Applied Physics Letters

Volume

91

Issue

13

DOI of Original Publication

10.1063/1.2794419

Comments

Originally published at http://dx.doi.org/10.1063/1.2794419

Date of Submission

April 2015

Abstract

High electron mobility was achieved in Al1−xInxN∕AlN∕GaN (x=0.20–0.12)heterostructurefield effect transistors(HFETs) grown by metal-organic chemical vapor deposition. Reduction of In composition from 20% to 12% increased the room temperature equivalent two-dimensional-electron-gas density from 0.90×1013to1.64×1013cm−2 with corresponding electron mobilities of 1600 and 1410cm2/Vs, respectively. The 10Kmobility reached 17600cm2/Vs for the nearly lattice-matched Al0.82In0.18N∕AlN∕GaNheterostructure with a sheet carrier density of 9.6×1012cm−2. For comparison, the AlInN∕GaNheterostructure without the AlN spacer exhibited a high sheet carrier density(2.42×1013cm−2) with low mobility(120cm2/Vs) at room temperature. The high mobility in our samples is in part attributed to ∼1nm AlN spacer which significantly reduces the alloy scattering as well as provides a smooth interface. The HFETs having gate dimensions of 1.5×40μm2 and a 5μm source-drain separation exhibited a maximum transconductance of ∼200mS∕mm with good pinch-off characteristics and over 10GHz current gain cutoff frequency.

Rights

Xie, J., Ni, X., Wu, M., et al. High electron mobility in nearly lattice-matched AlInN∕AlN∕GaN heterostructure field effect transistors. Applied Physics Letters, 91, 132116 (2007). Copyright © 2007 AIP Publishing LLC.

Is Part Of

VCU Electrical and Computer Engineering Publications