Author ORCID Identifier
https://orcid.org/0009-0006-8509-2611
Defense Date
2025
Document Type
Dissertation
Degree Name
Doctor of Philosophy
Department
Electrical & Computer Engineering
First Advisor
Vitaliy Avrutin
Second Advisor
Ümit Özgür
Third Advisor
Nibir Dhar
Fourth Advisor
Vamsi Yadavalli
Fifth Advisor
Michael Reshchikov
Abstract
Conventional CMOS electronics are highly susceptible to failure when exposed to ionizing radiation and high-voltage transients. These vulnerabilities have motivated the exploration of Nano/Micro Electromechanical Systems (N/MEMS) architectures, which inherently exhibit strong resilience to such environmental stressors. This work establishes a comprehensive framework for the design, fabrication, and experimental validation of configurable and reconfigurable N/MEMS logic and memory systems engineered for reliable operation in radiation- and voltage-transient-prone environments. The developed devices demonstrate neutron fluence tolerance more than 500 times higher than conventional radiation-hardened transistors. Testing confirmed exceptional robustness, with single-cantilever lifetimes exceeding 1.74 billion cycles and average logic gate lifetimes of 0.76 million cycles.
Configurable logic structures were realized through complementary cantilever relay networks in which device interconnects and source assignments were programmed via controlled fuse rupture and contact welding. Novel multi-gate relay designs were introduced to enhance device performance. Failure modes, including arc discharge, stiction, and contact degradation, were characterized and mitigated through optimized metallization, charge-dissipation strategies, and improved etching processes.
Additionally, this work introduced volatile MEMS memory units that exploit cantilever hysteresis and handle-layer biasing to achieve indefinite state retention without refresh. These devices operated stably for more than two weeks under continuous readout and withstood transient events that typically disable CMOS circuits. Integration of these memory units with MEMS logic enabled reconfigurable architectures such as 8-bit look-up tables capable of executing multiple logic functions. Collectively, the results establish a foundation for scalable, radiation-tolerant, and mechanically reconfigurable computing systems suitable for aerospace, defense, nuclear, and other safety-critical environments.
Rights
© The Author
Is Part Of
VCU University Archives
Is Part Of
VCU Theses and Dissertations
Date of Submission
12-10-2025